The micro-nano fabrication platform is located in the clean room of the Energy Materials Building, with a construction area of more than 1,100 square meters. According to the needs of process equipment, it is divided into seven laboratories, including one yellow room with a cleanliness of 100 and six clean rooms with a cleanliness of 1,000. The micro-nano fabrication platform combines a series of technical routes of new materials preparation, device processing, film deposition, structures etching and wafer sealing test. The platform completes systematically new material micro-nano devices from device design, material preparation, graphics processing to packaging integration, which can serve for the development of integrated circuits and semiconductors.
