Facility

The center for micro-nano fabrication and advanced characterization（CFC） is one of the important components of Tan Kah Kee Innovation Laboratory (IKKEM), which provides experimental environment conditions, state-of-the-art facilities and technical support for frontier research and technology breakthroughs. CFC consists of six functional platforms including the first noise-free ultra-precision lab in China, micro-nano fabrication platform, in-situ electron microscopy platform, spectroscopy and nano imaging platform, intelligent computing platform, and ultra-drying room. The platform now provides various energy resolution spectral characterization, qualitative and quantitative detection, structure determination, micro-nano fabrication and characterization for IKKEM and non-IKKEM users. Supports.